Archive


Table Tiles

August 2002

Factors affecting high-purity water mixed-bed ion exchange

By Carl Galletti & Laura Stitt

June 2002

Minimization of water usage for BOE etch processess

By Kimberley L. Ogden

Ionic and particulate contamination of SPM process rinse waters

By Drew Sinha & Henryson Omoregie

Hydrostatic pressure and leak testing of polymer piping systems used in high-purity water applications

By Karl-Heinz Mayer et al.

Improving a high-purity water system by advanced analytical techniques

By Gregory Carr & Steven Chen

March 2002

The effect of velocity on high-purity water systems rinse up and requalification

By Ron Lee et al.

February 2002

Photolytic destruction of TOC in spent rinse waters by H2O2 and UV radiation

By Robert P. Donovan

January 2002

Ozone injection system for bacterial control and sterilization in high-purity water

By Tracy Boswell et al.

Microbiology aspects of industrial and high-purity water treatment

By Larry Owen

Effects of space velocity on the performance of the final polishing mixed bed in typical high-purity water plants

By Avijit Dey et al.

Water conservation and materials issues in microelectronics production

By Thomas M. Laronge & Mark A. Lisin

December 2001

Role of high-purity water in future cleaning of silicon wafer by wet cleaning process

By Drew Sinha

October 2001

Start-up and commissioning of a semiconductor high-purity water treatment plant

By Paul Tan & Roger Wiebusch

A case study in the use of EDI for the production of electronics-grade water

By J. H. Wood et al.

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