Archive

September 2016

Microelectronics

An Approach for Copper and Hydrogen Peroxide Removal from Copper CMP and Solar Cell Wastewater

By Wismer et al.

November 2006

An in-depth study of copper selective resins and activated carbon processes in treating CMP wastewaters

By Michael W. Wismer & Richard E. Woodling

August 2005

A progress report on the direct application of imidodiacetic-functional IX resin in Cu CMP waste treatment

By Phil Fatula & Bruno Hees

November 2004

State-of-the-art copper CMP wastewater treatment

By Malek Salamor & Thomas Schramm

September 2004

Copper CMP wastewater treatment by electrocoagulation

By Sheng H. Lin & Chen L. Lai

September 2001

Copper CMP wastewater chemistry and treatment

By Gerald A. Krulik et al.

June 2001

Treatment of CMP wastewater in microelectronics applications

By Malek Salamor

June 2000

Conceptual design for CMP wastewater recycle

By Jack Martyak & Steven R. Gagnon