Calibration of resistivity measurements in the semiconductor industry

By Anthony C. Bevilacqua et al.

Resistivity instruments to meet semiconductor processing requirements

By Victor M. Braga

The effect of plastic tubing type on oxygen and resistivity measurements in high-purity water

Conductivity & resistivity measurements in water systems

By David Paul

Correlation of boron breakthrough versus resistivity and dissolved silica in RO & DI system

By Sushma Malhotra et al.

Unique temperature compensation for conductivity and resistivity measurements

By David M. Gray & Anthony C. Bevilacqua

Measurement of the resistivity of high-purity water at elevated temperatures

By Kenneth R. Morash et al.

DI water resistivity versus trace ion levels

By Kevin Pate