Design Distribution Materials

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Abstract

Effective ultrapure water (UPW*) distribution design is extremely important for the advanced microelectronics industry. The following are the main driving factors: purity, cost, and consistent hydraulics, offering stable pressure and sustainable supply flowrate to the tools. The UPW distribution system serves as a conduit for high-purity water. Organics, fluoride, and metal leaching, back contamination from the tools, and residual contamination from construction all pose contamination risks. In most cases, there is no additional treatment downstream of the polishing equipment, requiring careful design of the distribution system to ensure high purity. Water purity is maintained by using high-purity materials of construction, and maintaining sufficient recirculation flow, providing dilution of the extractable matter, as well as transporting the particulates to the polish system for treatment.

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