Microelectronics

Sodium and Silica Trace Measurement To Meet Semiconductor Water Specifications

By Morris Teo

Sodium Silica Monitoring Analytics

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Abstract

In the production of high-purity water, dissolved silica is known to be the first ion to breakthrough when the ion-exchange (IX) resin approaches depletion. Much work has been done in past decade in measuring dissolved silica online. Continuous silica monitoring after secondary mixed-bed IX in the water demineralization process ensures consistent water purity. Because of modern technologies for producing smarter and smaller devices, microchip sizes have been reduced significantly, leading to higher quality requirements for the water treatment. This trend of higher quality purified water also requires measurement of silica traces down to parts-per-trillion (ppt) level. In the cation deionization process, it is important to monitor the resinメs capacity in order to effectively retain the hardness cations (calcium, magnesium and sodium) from the water source. This article covers state-of-the-art technology to track silica levels online accurately and reliably down to 5 ppt, or 0.005 parts per billion (ppb) 24 hours a day, 7 days a week. This article also covers on-line monitoring of resin exhaustion by means of a modern sodium analyzer to identify breakthrough of unwanted ions and to signal the need for regeneration.

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