CARBON DIOXIDE MONITORING ORGANICS SEMICONDUCTORS STANDARDS TOC

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Abstract

There has been an increased interest in the past few years to understand how organic contamination in ultrapure water (UPW*) may affect semiconductor devices. In the past, organic contamination was measured in terms of its total oxidizable carbon content (TOC). This measurement of the organic content does not account for the type of organic, or how it may react with various wafer surfaces and how the reaction may affect device defects. The International Technology Roadmap for Semiconductors (ITRS) is now looking at categorizing organic contaminants in UPW, based on the ability to form polar bonds with the wafer surface. These categories of organics will be quantified using a failure mode effects analysis (FMEA) approach to determine the criticality of each subgroup.

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