MATERIALS OF CONSTRUCTION PTFE PARTICLES SEMICONDUCTORS ULTRAVIOLET

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Abstract

This article examines the commonly used thread sealing material polytetrafluoroethylene (PTFE) tape as a source of particulate contamination in high-purity water systems. Specifically, interactions between PTFE tape and ultraviolet (UV) treatment equipment often used in UPW systems were studied. High-purity water quality is growing more and more critical as the integrated circuit (IC) industry is faced with the ever-increasing challenge of producing smaller and smaller device features. To meet these challenges, companies must pay close attention to detail regarding particulate contamination. In this unforgiving environment, details such as the quality of each of hundreds of fitting seals can mean the difference between success and failure. Subtle interactions between components in a high-purity water system can cause a particle release, and result in a major contamination excursion. This article considers one such interactionﾗone or more poorly taped fittings shedding PTFE tape particles, and contaminating a downstream UV treatment unit, resulting in a particle release into the fab.

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